Pfeiffer Vacuum Group has launched its new turbopump called HiPace 2800 IT. This turbopump is used in the ion implantation process and due to its rotor design, it is able to pump light gases at high speeds. This turbopump is highly compatible with ion implantation processes, especially when hydrogen has accumulated the most gas. According to the company, the pumping speed of this turbopump is 2600 liters per second, and this is the distinguishing feature of this turbopump compared to similar products. Intelligent temperature management system of these pumps prevents condensation and formation of sediment during the process. Special coating of the rotor makes it completely resistant to all materials in the ion implantation process. HiPace 2800 IT turbopumps have a so-called hybrid bearing design consisting of ceramic ball bearings and magnetic radial bearings.
